I bet this is the first review of a MOCVD tool vendor on yelp. Let me say that Aixtron has the…read morebest platform for producing conventional III-V semiconductor epi wafers. I've done the Veeco thing and the planetary beats the RDR for within wafer uniformity and epi defects. The Veeco is better wafer to wafer but that don't cut it for VCSEL epi, you have lots of low yield wafers that are the same.
Aixtron personnel are professional, courteous and helpful. I like those guys, but I don't think I've met a gal.
